- Spectroscopic ellipsometer
- Infrared (IR) ellipsometer
- Variable angle ellipsometer
- Kinetic ellipsometer
- Offline / inline measure
- In-situ / ex-situ measure
- Small / large area mapping
- Laser ellipsometer
- Variable angle ellipsometer
- In-situ / ex-situ measure
- Kinetic ellipsometer
- X-y mapping
- Reflectometer
- Film thickness measure
- In-situ measurement
- Large area mapping
Spectroscopic Ellipsometry
Spectral range: 190 nm (DUV) to 25 µm (IR)
Measurement of: thickness, refractive index, extinction, ... more
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Applications: optical coatings, solar cells, ... more
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Laser Ellipsometry
Highly accurate reference tool for refractive index and film thickness
Measurement of: thickness, refractive index, extinction, ... more
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Applications: AR coatings for PV, single films, ... more
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Reflectometry
Spectral range: 200 nm (DUV) to 2.5 µm (IR)
Measurement of: thickness, refractive index, extinction, ... more
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Applications: photoresists, dielectrics, organics, ... more
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