Thin film metrology

Ellipsometers und reflectometers for research and development

Spectroscopic ellipsometers


SENresearch - UV-VIS-NIR spectroscopic ellipsometer family

SENpro - cost effective spectroscopic ellipsometer

SENDIRA - infrared spectroscopic ellipsometer

 

SE 400adv

Laser ellipsometers und CER


SE 400adv - multiple angle laser ellipsometer

SE 500adv - combined ellipsometry and reflectometry CER


 

Reflectometers


FTPadvanced - film thickness probe

RM 1000 - reflectometer

RM 2000 - reflectometer

 
Ellipsometers und reflectometers for industrial quality control

SENDURO

SENDURO®

The SENDURO® represents a family of spectroscopic ellipsometers for industrial quality control featuring automatic sample alignment and recipe oriented operation.

 

SE 800 GS

SE 800 GS

The fully automated spectroscopic ellipsometers measures layer stacks on large glass substrates.

 

FTPadvanced Inline

FTPadv

The manually operated FTPadv characterizes thin films on glass substrates.  

 

SE 400 B

The laser ellipsometer measures organic and inorganic films on sheet steel.

 

SE 300

SE 300 

The SE 300 is a highly specialized handheld laser ellipsometer that measures the protective coating on curved aluminum automotive reflectors.

 
Ellipsometers und reflectometers for photovoltaics

SE 400adv PV

SE 400adv PV

The laser ellipsometer measures thickness and refractive index of anti-reflection and passivation layers on textured multicrystalline and monocrystalline solar cells.

 

FTPadv Inline

The system measures the film thickness of thin film solar cells by multiple head reflectometry in a production line.


 

SE 800 PV

The SE 800 PV is a highly specialized ellipsometer for the analysis of single or multiple layers on textured monocrystalline and multicrystalline silicon solar cells.

 

RM 1000

The reflectometer measures the thickness of antireflective films on monocrystalline and multicrystalline silicon solar cells.

 
Mapping systems for large area substates 

SenSol M

The multiple sensor platform is manually moved over thin film solar cells on a tabletop system.

Panel size: 1.1 m x 1.6 m, 1.1 m x 1.4 m, others on request


Sensors for:

- Reflection measurements on smooth and rough films

- Non-contact sheet resistance measurement (Eddy current method)

- 4-point probe sheet resistance measurement


 

SenSol H 

The computer controlled horizontal mapping system moves a multiple sensor platform to map thin film solar cell.


Panel size: max 2.2 m x 2.6 m


Sensors for:

- haze, spectrally resolved haze measurement

- reflection measurements on smooth and rough films

- transmission measurements on smooth and rough films

- non-contact sheet resistance measurement (eddy current method)

- 4-point probe sheet resistance measurement



 

SenSol V

The computer controlled vertical mapping system measures thin film solar cells featuring a fixed sensor platform.


Panel size: 1.1 m x 1.6 m, 1.1 m x 1.4 m, others on request


Sensors for:

- haze, spectrally resolved haze measurement

- reflection measurements on smooth and rough films

- transmission measurements on smooth and rough films

- non-contact sheet resistance measurement (eddy current method)

- 4-point probe sheet resistance measurement



 
Weiterführende Informationen finden Sie auf der Homepage von SENTECH Instruments. www.sentech.de