Spectroscopic Reflectometers RM 1000 and RM 2000

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Push the limits for refractive index measurements

Most accurate single beam reflectance measurements by height and tilt adjustment RM1000_glossar-adjustment_280px Accurate height and tilt adjustment of samples using ACT functionality of sample and high light conductance of optical layout allow repeatable measurements of n and k, measurements on rough surfaces as well as thickness measurements of very thin films.

UV to NIR spectral range

RM 1000 430 nm – 930 nm
RM 2000 200 nm – 930 nm

High resolution mapping

The RM 1000 and RM 2000 can optionally be equipped with an x‑y mapping stage and mapping software, objective lens for small spot size, and a video camera.

The spectroscopic reflectometers RM 1000 and RM 2000 measure reflectance of flat or curved samples with smooth or rough surface. Thickness, extinction coefficient, and refractive index of single films or layer stacks are calculated using SENTECH FTPadv Expert software. Single films between 5 nm and up to 50 µm thickness, layer stacks, and substrates can be analyzed in the UV‑VIS‑NIR spectral range.

The RM 1000 and RM 2000 represent high end SENTECH reflectometers. The table top device comprises the highly stabilized light source, the reflection optics with auto-collimating telescope and microscope, the height and tilt adjustable sample platform, the spectral photometer, and the power supply. It can be optionally RM2000_glossar-options_150px Options: Mapping
(up to 200 x 200 mm²) Second objective lens SpectraRay/3 software PC equipped with an x‑y mapping stage and mapping software, objective lens for a second spot size, and a video camera.

Besides film thickness and optical constants, the composition of films (e. g. of AlGaN on GaN, SiGe on Si), AR coating (e. g. on textured silicon solar cells, UV sensitive GaN devices), and coatings on small medical stents can be measured. The reflectometers support applications in microelectronics, microsystems technology, optoelectronics, glass coatings, flat panel technology, life science, biotechnology, and others.

The comprehensive, recipe RM1000_glossar-database_280px oriented FTPadv EXPERT software for RM 1000 / 2000 includes measurement set-up, data acquisition, modeling, fitting, and reporting. An extensive databaseExtensive data base for: Dielectrics on semiconductors Epitaxial films on semiconductors Metallic films on semiconductors Organic films on semicoductors Films on metallic substrates Films on transparent substrates of predefined customer proven and ready to use applications is already built in. The AutoModel option allows for automatic selection of sample model from a spectra library. Based on SENTECH expertise in spectroscopic ellipsometry, a large materials library and the variety of dispersion models allow the analysis of nearly all materials and films. The data library can easily be updated with new optical data by the operator. SENTECH supports its customers with the measurement of new materials with unknown optical properties by spectroscopic ellipsometry.